A Study of Structure and Optical Properties of ZnO Thin Films Deposited by Using Thermal Evaporation Technique under Different Flow Rate of Oxygen O2

Abstract

 Zinc oxide (ZnO) transparent thin films with different oxygen flow rates (0.5, 1.0, and 1.5)Litter/min. were prepared by thermal evaporation technique on glass substrate at a temperature of 200℃ with rate (10±2)nm sec-1,  The crystallinity and structure of these films were analyzed  by X-ray diffraction (XRD). It exhibits a polycrystalline hexagonal wurtzite structure and the preferred orientation along (002) plane. The Optical properties of ZnO were determined through the optical transmission method using ulta violet–Visible spectrophotometer with in wave length (300-1100)nm. The optical transmittance of the ZnO films increases from 75% to 85% with increase flow rate of O2, and the optical band gap of ZnO films was found to be increased from (3.0) eV to (3.2) eV with increase flow rate of oxygen.The refractive index of ZnO flims increased from  (1.1) to (1.27) with increase flow rate of O2 .