Simulation Study of Sputtering Yield of Zn Target Bombarded By Xenon Ions

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Samira A. Ebrahiem
Firas M. Hady
Mustafa K. Jassim
Huda M. Tawfeek

Abstract

    Using a reduction of TRIM simulation data, the sputtering yield behaviour of Zinc target bombard by heavy Xenon ions plasma is studied. The sputtering yield as a function of Zinc layer width, Xenon ion number, energy of ions, and the angle of ion incidence are calculated and illustrated graphically. The corresponding energy loss due to ionization, vacancies and phonons, are graphically shown and discussed. Further, we fit the calculations and expressions for fitted curves are presented with its coefficients.

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How to Cite
Ebrahiem, S. A., Hady, F. M., Jassim, M. K., & Tawfeek, H. M. (2017). Simulation Study of Sputtering Yield of Zn Target Bombarded By Xenon Ions. Ibn AL- Haitham Journal For Pure and Applied Sciences, 29(2), 104–114. Retrieved from https://jih.uobaghdad.edu.iq/index.php/j/article/view/89
Section
physics