Gas Sensitivity and Optical Detector of Indium Oxide films

Abstract

In this research, we studied the structural and optical properties of  In2O3 films which prepared by chemical spray pyrolysis method on the glass substrate heated 400  . The effect of annealing temperature 100 for one hour on theses properties are studied. The result of Xray diffraction showed the prepared films were polycrystalline and orientation was (222) before and after annealing, optical properties study for prepared films by using (UV-VIS-NIR) spectrophotometer in the wave length range (300-1100)nm, We found the transmission increases after annealing to 90%. Sensitivity measurement of In2O3 films for gas (CO) and optical detector showed that after annealing at temperature 100 .